Domanda di colloquio di Lam Research
How would you increase anisotropy during an etch process?
Risposte di colloquio
Anonimo
14 nov 2016
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.
How would you increase anisotropy during an etch process?
Anonimo
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.